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Typically, optical pressure sensors use a silicon diaphragm placed at the end of an optical fiber interferometer. Variations in pressure cause the diaphragm to flex, altering the interferometer's ...
However, Ohkawa says that there is a solution. "In the next step we will use a silicon nitride diaphragm layer," he told Optics.org at the Photonics West poster session. "This should help reduce the ...
Furthermore, capitalizing on the diaphragm vibration mechanism, the device achieves a remarkable sensitivity of 0.558 V/kPa, significantly outperforming traditional end-face fiber-optic sensors.
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