When the lithography machine is running, the heat generated is quickly transferred to the silicon carbide water-cooled ...

Lithography uses a kind of template, called a photomask—or just mask—for creating patterns on semiconductor wafers. The industry is always looking for methods that improve resolution and ...

Industrial ceramics, with their high hardness, wear resistance, high temperature resistance, and strong chemical stability, ...

The first lithography tools were fairly simple, but the technologies that produce today’s chips are among humankind’s most complex inventions. When we talk about computing these days, we tend ...

Imec has unveiled a new climate-friendly way to produce patterns on chips using lithography and etch for advanced chip factories.. Leuven, Belgium-based Imec said the tech can reduce the carbon ...

ASML Optics has shown the first patterns using the full-field EUV (extreme-ultraviolet) alpha demo tool at the State University of New York—Albany’s College of Nanoscale Science and Engineering. The ...

Competitive post-lithography pattern enhancement systems are typically limited to shrinks of less than 30-nm, said Jeff Marks, Lam Research's vice president of New Businesses. Advertisement ...

Commences sample supply of high-NA EUV photomasks for next-generation semiconductors Dai Nippon Printing Co., Ltd. (DNP, TOKYO: 7912) has successfully achieved the fine pattern resolution required ...