The smallest feature an optical lithography tool can print depends mainly on two factors. The first is the wavelength of light. Just as a finer paintbrush allows for more detailed strokes ...

Researchers developed a scalable fabrication process using soft nanoimprint lithography to create lithium niobate metalenses, ...

"There might be a path where we can use non-optical technologies, that is, using our process equipment to solve some of the lithography issues," Du said on the sidelines of the annual Semicon ...

Thus, the size of the optical system can be reduced without affecting its performance." Production will also be simpler, "Metasurfaces can be manufactured using advanced lithography and etching ...