Interestingly, the film-based vacuum pump is “able to pull a vacuum down to 300 millibars of pressure (30% of standard ...

For more than 10 years, TNO’s experts at Holst Centre have been developing thin-film ... and uniformity of film composition and thickness. TNO’s spatial ALD (s-ALD) solution adds much higher ...

Made from ultra-thin ... the sensor has the potential to continuously gather data at an especially sensitive rate compared to traditional devices. With this sensor, even the smallest pressure ...