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In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by ...
DC-DC Converters for driving microactuators in microelectromechanical systems (MEMS) normally demand higher conversion ratios and stricter volume and weight than those in solar photovoltaic (PV) ...