We design and experimentally fabricate a 8×8 arrayed waveguide grating router (AWGR) with a channel spacing of400 GHz based on silicon-on-insulator (SOI) platform. The arrayed waveguide region of this ...

The grating, folded by a flat reflecting surface, can be printed in a single-exposure field of a photolithographic stepper. Advanced plasma assisted deposition is used to prepare waveguides with very ...