Ferroelectric microelectromechanical systems (MEMS) has been a growing area of research in past decades, in which ferroelectric films are combined with silicon technology for a variety of applications ...

Neuro-ventilatory coupling rose with reduced pressure support, revealing diaphragm readiness for ventilator liberation in ICU ...

In this letter, we report an ultrasensitive pressure sensor based on an integrated circular piezoelectric microelectromechanical resonator and stainless-steel diaphragm structure. Finite-element ...

In this work, a complete formulation for analysis of a CPS with a square diaphragm having a linkage film has been presented. A comprehensive study of sensor parameters like capacitance, deflection of ...