We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing ...

Developing a method to pattern organic molecules, particularly on the sub-100-nm scale, is of wide interest in current nanoscience for a broad range of technological applications. Because of the ...

Overlay (OVL) is a key index in lithography, which will determine product quality, and its measurement is affected by many factors, such as measurement tool, measurement strategy, OVL mark and STI CMP ...