TDK Corporation has expanded its micro-electro-mechanical system (MEMS) inertial sensors portfolio with the Tronics AXO315 T0 ...

Tronics Microsystems, a TDK Group Company that manufactures standard and custom MEMS inertial sensors solutions for transportation, energy, and industrial applications ...

Abstract: This paper studies the primary control problem of a vibrating MEMS gyroscope. A nonlinear robust adaptive control scheme is proposed for the drive axis of a vibrating MEMS gyroscope with ...

Kyocera will showcase its portfolio of semiconductor, fineceramic and automotive components at the exhibition and conference ...

In this paper, a heat conduction structure (HCS) is designed to conduct the concentrated heat on the etched wafer in the etching process of MEMS devices with support anchors. During the reactive ion ...