This paper reports a MEMS Gyroscope based on mechanical frequency modulation. The gyroscope operates by tracking the resonant frequencies of two high-Q degenerate elliptical modes (∼426 kHz) in a ...

In this work, a monolithic tri-axis MEMS gyroscope is realized through a TSMC SOI-MEMS platform and the device is characterized in ambient pressure. To fully make use of the limited chip area, the ...