In double patterning lithography (DPL), overlay errors between two patterning steps of the same layer translate into CD variability. Since CD uniformity budget is very tight, meeting requirement of ...

The double migration technique, which is based on mineral formation in an electrical field, was used to synthesize composites of gelatin with calcium phosphate and carbonate, respectively, in order to ...

To make bearingless motors (BMs) more competitive, it is imperative to reduce the cost while ensuring high performance. In this article, the driving system of the BM is optimized from the perspectives ...