The most sought after resist designs in contemporary lithography are predicated on two-component systems in which resist functions are supplied by two separate components. On the basis of the ...

Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure ...

ASML is the only company in the world that currently produces extreme ultraviolet (EUV) lithography machines, which are used to produce cutting-edge microchips. It also builds other types of ...