This is the story behind one of the most valuable — and perhaps, most improbable — technologies humanity has ever created. It's a breakthrough called extreme ultraviolet lithography, and it's ...

Unlike most photonic circuits which are formed using patterns etched into semiconductor mask using lithography, purely light-based circuits are a tantalizing possibility.

Soft lithography is a family of non-photolithographic techniques used for fabricating micro- and nanostructures using elastomeric stamps, molds, and conformable photomasks. Unlike conventional ...

Imec has unveiled a new climate-friendly way to produce patterns on chips using lithography and etch for advanced chip factories.

The first lithography tools were fairly simple, but the technologies that produce today’s chips are among humankind’s most complex inventions.

A deep dive into ASML's monopoly in EUV lithography, its response to market headwinds, and why it remains a keystone of the global semiconductor industry.

ASML's export restrictions on DUV equipment sales to China may slightly impact revenues, but its competitiveness and dominant market position remain. Read more here.

Inverse lithography technology (ILT)—a mathematically rigorous inverse approach that determines the mask shapes that will produce the desired on-wafer results—has been seen as a promising ...

Huawei has confirmed in a posting on its website reports about its breakthrough in making a light source component used in EUV lithography systems which are required for making high-end processors ...

A diagram of the mirrors from Huawei's patent. ASML needed more than €6 billion and 17 years to develop the first batch of EUV lithography machines that could be sold.