In this work, a monolithic tri-axis MEMS gyroscope is realized through a TSMC SOI-MEMS platform and the device is characterized in ambient pressure. To fully make use of the limited chip area, the ...

Professor Fedder's group is designing a variety of MEMS, including microaccelerometers, gyroscopes, resonant sensors, and x-y-z microservos, using a unique process that combines foundry CMOS with thin ...

Summary MEMS technology has become essential to modern automotive systems, driving improvements in safety, performance, and driver convenience. From addressing the critical issue of headlight leveling ...

This is part 2 of my Control Moment Gyroscope (CMG) balancing experimentation. I've built many robots that use solid state gyros and accelerometers to make them balance - mainly two wheel ...

This paper reports on the implementation of an interface ASIC for MEMS vibratory gyroscopes exhibiting a wide tuning range from 7 to 31 kHz with a power consumption of 1.6 mW and a dynamic range of 92 ...